Novel Dual Work Function Buried Channel Array Transistor Process Design for Sub-17 nm DRAM
Dong-Sik Park; Dong-Hyun Im; Yun-Jung Kim; Sung Sam Lee; Byung-Jae Kang; Jae-Hong Seo; Taewoong Koo; Byoungdeog Choi
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Access
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/access.2024.3371508
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Cite this source
Dong-Sik Park; Dong-Hyun Im; Yun-Jung Kim; Sung Sam Lee; Byung-Jae Kang; Jae-Hong Seo; Taewoong Koo; Byoungdeog Choi. Novel Dual Work Function Buried Channel Array Transistor Process Design for Sub-17 nm DRAM. IEEE Access. 2024. https://doi.org/10.1109/access.2024.3371508