Source and characteristics of inorganic acidic gases and aerosols emission in a semiconductor plant
Jyun-Lun Peng; Ming-Peng Yeh; Kuan-Hung Liu; Tony Chen; Tzu-Sou Chuang; Sher Ling Lee; Kuo-Lun Tung
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Separation and Purification Technology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.seppur.2024.128806
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Cite this source
Jyun-Lun Peng; Ming-Peng Yeh; Kuan-Hung Liu; Tony Chen; Tzu-Sou Chuang; Sher Ling Lee; Kuo-Lun Tung. Source and characteristics of inorganic acidic gases and aerosols emission in a semiconductor plant. Separation and Purification Technology. 2025-02. https://doi.org/10.1016/j.seppur.2024.128806