Evaluating Modern Visual Anomaly Detection Approaches in Semiconductor Manufacturing: A Comparative Study
Manuel Barusco; Francesco Borsatti; Youssef Ben Khalifa; Davide Dalle Pezze; Gian Antonio Susto
- Published
- Publisher
- Elsevier BV
- Journal / collection
- IFAC-PapersOnLine
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.ifacol.2025.12.018
The original publisher provides the full text and its access options.
Cite this source
Manuel Barusco; Francesco Borsatti; Youssef Ben Khalifa; Davide Dalle Pezze; Gian Antonio Susto. Evaluating Modern Visual Anomaly Detection Approaches in Semiconductor Manufacturing: A Comparative Study. IFAC-PapersOnLine. 2025. https://doi.org/10.1016/j.ifacol.2025.12.018