A pressure sensitive silicon field effect transistor comprising a buffer-free piezoelectric Al0.72Sc0.28N layer
Rafael Ashkrizzadeh; Ole Gronenberg; Adrian Petraru; Georg Schönweger; Erik Mackensen; Henning Hanssen; Lorenz Kienle; Hermann Kohlstedt
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Thin Solid Films
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.tsf.2024.140590
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Cite this source
Rafael Ashkrizzadeh; Ole Gronenberg; Adrian Petraru; Georg Schönweger; Erik Mackensen; Henning Hanssen; Lorenz Kienle; Hermann Kohlstedt. A pressure sensitive silicon field effect transistor comprising a buffer-free piezoelectric Al0.72Sc0.28N layer. Thin Solid Films. 2025-01. https://doi.org/10.1016/j.tsf.2024.140590