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Research literature / Conference paper

Cold Atmospheric Plasma Metallization of Power Semiconductor Devices with CuSn Pseudo-Alloys for Diffusion Soldering

Manuela Ockel; Aleyna Gökçen; Bettina Ottinger; Matthias Petersen; Christian Voigt; Jörg Franke

Published
Publisher
ASM International
Journal / collection
International Thermal Spray Conference
Research area
Semiconductors
Source type
Conference paper
DOI
10.31399/asm.cp.itsc2024p0017

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Manuela Ockel; Aleyna Gökçen; Bettina Ottinger; Matthias Petersen; Christian Voigt; Jörg Franke. Cold Atmospheric Plasma Metallization of Power Semiconductor Devices with CuSn Pseudo-Alloys for Diffusion Soldering. International Thermal Spray Conference. 2024-04-29. https://doi.org/10.31399/asm.cp.itsc2024p0017

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