Anomaly Detection System for Semiconductor Deposition Process Using AI
Min-Ho Ha; Saba Arshad; Seung-Won Seo; Tae-Hyoung Park
- Published
- Publisher
- Institute of Control, Robotics and Systems
- Journal / collection
- Journal of Institute of Control, Robotics and Systems
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.5302/j.icros.2024.24.0177
The original publisher provides the full text and its access options.
Cite this source
Min-Ho Ha; Saba Arshad; Seung-Won Seo; Tae-Hyoung Park. Anomaly Detection System for Semiconductor Deposition Process Using AI. Journal of Institute of Control, Robotics and Systems. 2024-11-30. https://doi.org/10.5302/j.icros.2024.24.0177