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Research literature / Conference paper

Semiconductor image analysis using data-efficient machine learning

Songhyun Yu; Sangho Yoon; Sungjin Lim; Hoonseok Park; Subong Shon; Suil Son; Chulmoo Kang; Yoonsung Bae; Hansaem Park; Sungsik Jo; Seungwoo Oh; Dongryul Lee; Seonghoon Jeong; Sungho Lee; Myungjun Lee

Published
Publisher
SPIE
Journal / collection
Metrology, Inspection, and Process Control XXXIX
Research area
AI & compute
Source type
Conference paper
DOI
10.1117/12.3050624

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Songhyun Yu; Sangho Yoon; Sungjin Lim; Hoonseok Park; Subong Shon; Suil Son; Chulmoo Kang; Yoonsung Bae; Hansaem Park; Sungsik Jo; Seungwoo Oh; Dongryul Lee; Seonghoon Jeong; Sungho Lee; Myungjun Lee. Semiconductor image analysis using data-efficient machine learning. Metrology, Inspection, and Process Control XXXIX. 2025-04-24. https://doi.org/10.1117/12.3050624

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