Deep Learning-Based Wafer Fabrication Quality Assessment in Semiconductor Manufacturing
Jinxing Zhao; Quan Meng; Haolan Zheng; Yuhao Fan; Zinuo Zeng
- Published
- Publisher
- Inderscience Publishers
- Journal / collection
- International Journal of Mechatronics and Manufacturing Systems
- Research area
- AI & compute
- Source type
- Journal article
- DOI
- 10.1504/ijmms.2025.10077423
The original publisher provides the full text and its access options.
Cite this source
Jinxing Zhao; Quan Meng; Haolan Zheng; Yuhao Fan; Zinuo Zeng. Deep Learning-Based Wafer Fabrication Quality Assessment in Semiconductor Manufacturing. International Journal of Mechatronics and Manufacturing Systems. 2025. https://doi.org/10.1504/ijmms.2025.10077423