HotspotFusion: A Generative AI Approach to Predicting CMP Hotspot in Semiconductor Manufacturing
Hsiu-Hui Hsiao; Kung-Jeng Wang
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Semiconductor Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsm.2024.3510376
The original publisher provides the full text and its access options.
Cite this source
Hsiu-Hui Hsiao; Kung-Jeng Wang. HotspotFusion: A Generative AI Approach to Predicting CMP Hotspot in Semiconductor Manufacturing. IEEE Transactions on Semiconductor Manufacturing. 2025-02. https://doi.org/10.1109/tsm.2024.3510376