Semiconductor Wafer Particle Defect Classification Based on Deep Learning and Multimodal Feature Fusion
Wenxin Liu; Guomeng Li; Qingsong Cui; Zeming Zhang; Xinxin Wang; Chengjie Bai
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 IEEE 12th International Conference on Computer Science and Network Technology (ICCSNT)
- Research area
- AI & compute
- Source type
- Conference paper
- DOI
- 10.1109/iccsnt62291.2024.10776716
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Cite this source
Wenxin Liu; Guomeng Li; Qingsong Cui; Zeming Zhang; Xinxin Wang; Chengjie Bai. Semiconductor Wafer Particle Defect Classification Based on Deep Learning and Multimodal Feature Fusion. 2024 IEEE 12th International Conference on Computer Science and Network Technology (ICCSNT). 2024-10-19. https://doi.org/10.1109/iccsnt62291.2024.10776716