High-performance single-crystalline In2O3 field effect transistor toward three-dimensional large-scale integration circuits
Shunpei Yamazaki; Fumito Isaka; Toshikazu Ohno; Yuji Egi; Sachiaki Tezuka; Motomu Kurata; Hiromi Sawai; Ryosuke Motoyoshi; Etsuko Asano; Satoru Saito; Tatsuya Onuki; Takanori Matsuzaki; Michio Tajima
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Communications Materials
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1038/s43246-024-00625-x
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Shunpei Yamazaki; Fumito Isaka; Toshikazu Ohno; Yuji Egi; Sachiaki Tezuka; Motomu Kurata; Hiromi Sawai; Ryosuke Motoyoshi; Etsuko Asano; Satoru Saito; Tatsuya Onuki; Takanori Matsuzaki; Michio Tajima. High-performance single-crystalline In2O3 field effect transistor toward three-dimensional large-scale integration circuits. Communications Materials. 2024-09-11. https://doi.org/10.1038/s43246-024-00625-x