Optimizing the refrigerants in ultra-low temperature Semiconductor processing chiller with mixed Refrigerant
Hye-In Jung; Chang-Hyo Son; Joon-Hyuk Lee
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Case Studies in Thermal Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.csite.2024.104864
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Cite this source
Hye-In Jung; Chang-Hyo Son; Joon-Hyuk Lee. Optimizing the refrigerants in ultra-low temperature Semiconductor processing chiller with mixed Refrigerant. Case Studies in Thermal Engineering. 2024-09. https://doi.org/10.1016/j.csite.2024.104864