Design of laser direct writing system for semiconductor photoelectrochemical etching
Wen Yuan; Yao Liu; Jiawei Cheng; Lianhuan Han; Chuan Liu; Jian-Jia Su; Dongping Zhan
- Published
- Publisher
- SPIE
- Journal / collection
- Tenth International Conference on Mechanical Engineering, Materials, and Automation Technology (MMEAT 2024)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3046709
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Cite this source
Wen Yuan; Yao Liu; Jiawei Cheng; Lianhuan Han; Chuan Liu; Jian-Jia Su; Dongping Zhan. Design of laser direct writing system for semiconductor photoelectrochemical etching. Tenth International Conference on Mechanical Engineering, Materials, and Automation Technology (MMEAT 2024). 2024-09-27. https://doi.org/10.1117/12.3046709