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Research literature / Conference paper

Machine Learning Technologies for Semiconductor Manufacturing

Lifei Sun; Pengfei Lyu; Xiao Zhang; Junjie Wu; Qingpeng Wang; Joseph Ervin; Yushan Chi

Published
Publisher
IEEE
Journal / collection
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
Research area
AI & compute
Source type
Conference paper
DOI
10.1109/cstic61820.2024.10532076

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Lifei Sun; Pengfei Lyu; Xiao Zhang; Junjie Wu; Qingpeng Wang; Joseph Ervin; Yushan Chi. Machine Learning Technologies for Semiconductor Manufacturing. 2024 Conference of Science and Technology for Integrated Circuits (CSTIC). 2024-03-17. https://doi.org/10.1109/cstic61820.2024.10532076

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