Research on grinding parameter optimization based on adhesive semiconductor quartz disc
Yuanhao Ma; Zhanjie Li; Gang Jin; Guangyu Wang; Huaixin Lin; Xin Zhang; Longsi Li
- Published
- Publisher
- IOP Publishing
- Journal / collection
- Journal of Physics: Conference Series
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1088/1742-6596/2873/1/012047
The original publisher provides the full text and its access options.
Cite this source
Yuanhao Ma; Zhanjie Li; Gang Jin; Guangyu Wang; Huaixin Lin; Xin Zhang; Longsi Li. Research on grinding parameter optimization based on adhesive semiconductor quartz disc. Journal of Physics: Conference Series. 2024-10-01. https://doi.org/10.1088/1742-6596/2873/1/012047