Modeling and Analysis of Dual-Time Petri Nets With Application to Semiconductor Manufacturing Systems
Shu Zhang; Ruotian Liu; Yufeng Chen; Maria Pia Fanti; Zhiwu Li
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Automation Science and Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tase.2025.3624696
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Cite this source
Shu Zhang; Ruotian Liu; Yufeng Chen; Maria Pia Fanti; Zhiwu Li. Modeling and Analysis of Dual-Time Petri Nets With Application to Semiconductor Manufacturing Systems. IEEE Transactions on Automation Science and Engineering. 2025. https://doi.org/10.1109/tase.2025.3624696