Outgassing rate measurements made traceable for the semiconductor industry
Karl Jousten; Annas bin Ali; Matthias Bernien; Ton van de Kerkhoff; Daniel Peeters; Matthias Roos; Janez Setina; John Stegemann
- Published
- Publisher
- Bureau International des Poids et Mesures (BIPM)
- Journal / collection
- 150th anniversary of the Metre Convention — From Units to the Universe
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.59161/hyio6826
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Cite this source
Karl Jousten; Annas bin Ali; Matthias Bernien; Ton van de Kerkhoff; Daniel Peeters; Matthias Roos; Janez Setina; John Stegemann. Outgassing rate measurements made traceable for the semiconductor industry. 150th anniversary of the Metre Convention — From Units to the Universe. 2025. https://doi.org/10.59161/hyio6826