Optimizing the Performance of the Atomic-Layer-Deposited Zinc–Tin-Oxide Thin Film Transistor by Ozone Treatment and Thermal Annealing
Jinheon Choi; Yonghee Lee; Sukin Kang; Sahngik Aaron Mun; Cheol Seong Hwang
- Published
- Publisher
- American Chemical Society (ACS)
- Journal / collection
- ACS Applied Electronic Materials
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1021/acsaelm.4c00916
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Cite this source
Jinheon Choi; Yonghee Lee; Sukin Kang; Sahngik Aaron Mun; Cheol Seong Hwang. Optimizing the Performance of the Atomic-Layer-Deposited Zinc–Tin-Oxide Thin Film Transistor by Ozone Treatment and Thermal Annealing. ACS Applied Electronic Materials. 2024-07-31. https://doi.org/10.1021/acsaelm.4c00916