The road to net-zero emissions in IC manufacturing
Olga Bubnova
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Nature Reviews Electrical Engineering
- Research area
- Industrial systems
- Source type
- Journal article
- DOI
- 10.1038/s44287-024-00023-y
The original publisher provides the full text and its access options.
Cite this source
Olga Bubnova. The road to net-zero emissions in IC manufacturing. Nature Reviews Electrical Engineering. 2024-02-22. https://doi.org/10.1038/s44287-024-00023-y