Design of temperature and humidity control system for semiconductor manufacturing workshop
xingchao xu
- Published
- Publisher
- SPIE
- Journal / collection
- Third International Conference on New Materials, Machinery, and Vehicle Engineering (NMMVE 2024)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3055249
The original publisher provides the full text and its access options.
Cite this source
xingchao xu. Design of temperature and humidity control system for semiconductor manufacturing workshop. Third International Conference on New Materials, Machinery, and Vehicle Engineering (NMMVE 2024). 2024-11-04. https://doi.org/10.1117/12.3055249