Metal Oxynitride Semiconductor Prepared by Reactive Sputtering of Metal Oxide Target for Thin Film Devices
Yuseong Jang; Soo-Yeon Lee
- Published
- Publisher
- International Display Workshops General Incorporated Association
- Journal / collection
- Proceedings of the International Display Workshops
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.36463/idw.2024.1127
The original publisher provides the full text and its access options.
Cite this source
Yuseong Jang; Soo-Yeon Lee. Metal Oxynitride Semiconductor Prepared by Reactive Sputtering of Metal Oxide Target for Thin Film Devices. Proceedings of the International Display Workshops. 2024-12-05. https://doi.org/10.36463/idw.2024.1127