Application of atomic force microscopy technology in doping characterization of semiconductor materials and devices
Xiaomeng Liu; Xiangsheng Wang; Xinyou Liu; Yanpeng Song; Yiwen Zhang; Hailing Wang; Ying Zhang; Guilei Wang; Chao Zhao
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Microelectronic Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.mee.2024.112310
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Cite this source
Xiaomeng Liu; Xiangsheng Wang; Xinyou Liu; Yanpeng Song; Yiwen Zhang; Hailing Wang; Ying Zhang; Guilei Wang; Chao Zhao. Application of atomic force microscopy technology in doping characterization of semiconductor materials and devices. Microelectronic Engineering. 2025-03. https://doi.org/10.1016/j.mee.2024.112310