Few-Shot AI Segmentation of Semiconductor Device FIB-SEM Tomography Data
Heiko Stegmann; Flavio Cognigni
- Published
- Publisher
- ASM International
- Journal / collection
- International Symposium for Testing and Failure Analysis
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.31399/asm.cp.istfa2024p0013
The original publisher provides the full text and its access options.
Cite this source
Heiko Stegmann; Flavio Cognigni. Few-Shot AI Segmentation of Semiconductor Device FIB-SEM Tomography Data. International Symposium for Testing and Failure Analysis. 2024-10-28. https://doi.org/10.31399/asm.cp.istfa2024p0013