Investigation of silicon-on-insulator back-gate nano vacuum channel transistor array
Kaifang Weng; Changsheng Shen; Zhaofu Chen; Ningfeng Bai
- Published
- Publisher
- American Vacuum Society
- Journal / collection
- Journal of Vacuum Science & Technology B
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1116/6.0003346
The original publisher provides the full text and its access options.
Cite this source
Kaifang Weng; Changsheng Shen; Zhaofu Chen; Ningfeng Bai. Investigation of silicon-on-insulator back-gate nano vacuum channel transistor array. Journal of Vacuum Science & Technology B. 2024-02-02. https://doi.org/10.1116/6.0003346