ITZO-Based Self-Aligned Top Gate Thin-Film Transistor with Minimum Parasitic Capacitance for Long-Retention 2T0C DRAM
Jeong-Min Park; Sein Lee; Junseo Lee; Jang-Yeon Kwon
- Published
- Publisher
- American Chemical Society (ACS)
- Journal / collection
- ACS Omega
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1021/acsomega.4c08274
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Cite this source
Jeong-Min Park; Sein Lee; Junseo Lee; Jang-Yeon Kwon. ITZO-Based Self-Aligned Top Gate Thin-Film Transistor with Minimum Parasitic Capacitance for Long-Retention 2T0C DRAM. ACS Omega. 2024-12-31. https://doi.org/10.1021/acsomega.4c08274