Task-based feasibility evaluation of an LLM-enhanced digital twin for semiconductor manufacturing analytics
Seongho Cho; Gihan Lee; Sangchul Park
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Computers & Industrial Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.cie.2026.112281
The original publisher provides the full text and its access options.
Cite this source
Seongho Cho; Gihan Lee; Sangchul Park. Task-based feasibility evaluation of an LLM-enhanced digital twin for semiconductor manufacturing analytics. Computers & Industrial Engineering. 2026-10. https://doi.org/10.1016/j.cie.2026.112281