A Novel Multiscale Residual Aggregation Network-Based Image Super-Resolution Algorithm for Semiconductor Defect Inspection
Yang Liu; Lilei Hu; Bin Sun; Can Ma; Jingxuan Shen; Chang Chen
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Semiconductor Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsm.2023.3327767
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Cite this source
Yang Liu; Lilei Hu; Bin Sun; Can Ma; Jingxuan Shen; Chang Chen. A Novel Multiscale Residual Aggregation Network-Based Image Super-Resolution Algorithm for Semiconductor Defect Inspection. IEEE Transactions on Semiconductor Manufacturing. 2024-02. https://doi.org/10.1109/tsm.2023.3327767