A Dual-Gate Vertical Channel IGZO Transistor for BEOL Stackable 3D Parallel Integration for Memory and Computing Applications
Ziyi Liu; Yiwei Dul; Renrong Liang; Zhigang Zhang; Liyang Pan; Jianshi Tang; Renrong Liang; Bin Gao; Qi Hu; Jun Xu; He Qian; Huaqiang Wu; Yuegang Zhang
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/vlsitechnologyandcir46783.2024.10631472
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Cite this source
Ziyi Liu; Yiwei Dul; Renrong Liang; Zhigang Zhang; Liyang Pan; Jianshi Tang; Renrong Liang; Bin Gao; Qi Hu; Jun Xu; He Qian; Huaqiang Wu; Yuegang Zhang. A Dual-Gate Vertical Channel IGZO Transistor for BEOL Stackable 3D Parallel Integration for Memory and Computing Applications. 2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits). 2024-06-16. https://doi.org/10.1109/vlsitechnologyandcir46783.2024.10631472