TEM Sample Preparation for Electron Microscopy Characterization and Failure Analysis of Advanced Semiconductor Devices (2026 Update)
Cecile S. Bonifacio
- Published
- Publisher
- ASM International
- Journal / collection
- International Symposium for Testing and Failure Analysis
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.31399/asm.cp.istfa2026tp00q1
The original publisher provides the full text and its access options.
Cite this source
Cecile S. Bonifacio. TEM Sample Preparation for Electron Microscopy Characterization and Failure Analysis of Advanced Semiconductor Devices (2026 Update). International Symposium for Testing and Failure Analysis. 2026-10-04. https://doi.org/10.31399/asm.cp.istfa2026tp00q1