Analysis of Nanosheet Field-Effect Transistor With Local Bottom Isolation
Jiwon You; Hyunwoo Kim; Daewoong Kwon
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Electron Devices
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/ted.2024.3373723
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Cite this source
Jiwon You; Hyunwoo Kim; Daewoong Kwon. Analysis of Nanosheet Field-Effect Transistor With Local Bottom Isolation. IEEE Transactions on Electron Devices. 2024-05. https://doi.org/10.1109/ted.2024.3373723