Dynamic characterization and optimization of moving platforms for enhancing precision in semiconductor point testing equipment
Tzu-Chi Chan; Su-Yi Fan; Aman Ullah; Umar Farooq
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- International Journal on Interactive Design and Manufacturing (IJIDeM)
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1007/s12008-024-02063-y
The original publisher provides the full text and its access options.
Cite this source
Tzu-Chi Chan; Su-Yi Fan; Aman Ullah; Umar Farooq. Dynamic characterization and optimization of moving platforms for enhancing precision in semiconductor point testing equipment. International Journal on Interactive Design and Manufacturing (IJIDeM). 2024-08-20. https://doi.org/10.1007/s12008-024-02063-y