Stealth dicing strategy for fabricating the cleavage mirror facets of semiconductor laser
Menglai Lei; Linghai Meng; Yucheng Lin; Yujing Deng; Huanqing Chen; Lei Liu; Jianbo Fu; Shengxiang Jiang; Hua Zong; Xiaodong Hu
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Materials & Design
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.matdes.2025.113695
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Cite this source
Menglai Lei; Linghai Meng; Yucheng Lin; Yujing Deng; Huanqing Chen; Lei Liu; Jianbo Fu; Shengxiang Jiang; Hua Zong; Xiaodong Hu. Stealth dicing strategy for fabricating the cleavage mirror facets of semiconductor laser. Materials & Design. 2025-03. https://doi.org/10.1016/j.matdes.2025.113695