Tensor‐based process control and monitoring for semiconductor manufacturing with unstable disturbances
Yanrong Li; Juan Du; Fugee Tsung; Wei Jiang
- Published
- Publisher
- Wiley
- Journal / collection
- Naval Research Logistics (NRL)
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1002/nav.22228
The original publisher provides the full text and its access options.
Cite this source
Yanrong Li; Juan Du; Fugee Tsung; Wei Jiang. Tensor‐based process control and monitoring for semiconductor manufacturing with unstable disturbances. Naval Research Logistics (NRL). 2024-09-26. https://doi.org/10.1002/nav.22228