Sputter epitaxy of ScAlN films on GaN high electron mobility transistor structures
Tomoya Okuda; Shunsuke Ota; Takahiko Kawahara; Kozo Makiyama; Ken Nakata; Takuya Maeda; Atsushi Kobayashi
- Published
- Publisher
- AIP Publishing
- Journal / collection
- Applied Physics Letters
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1063/5.0228924
The original publisher provides the full text and its access options.
Cite this source
Tomoya Okuda; Shunsuke Ota; Takahiko Kawahara; Kozo Makiyama; Ken Nakata; Takuya Maeda; Atsushi Kobayashi. Sputter epitaxy of ScAlN films on GaN high electron mobility transistor structures. Applied Physics Letters. 2025-02-03. https://doi.org/10.1063/5.0228924