Ensemble Learning for Wafer Defect Pattern Classification in the Semiconductor Industry
Chia-Yun Lee; Matúš Pleva; Daniel Hládek; Chin-We Lee; Ming-Hsiang Su
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Access
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/access.2025.3604405
The original publisher provides the full text and its access options.
Cite this source
Chia-Yun Lee; Matúš Pleva; Daniel Hládek; Chin-We Lee; Ming-Hsiang Su. Ensemble Learning for Wafer Defect Pattern Classification in the Semiconductor Industry. IEEE Access. 2025. https://doi.org/10.1109/access.2025.3604405