Microwave Photomodulation Method for Noninvasive Analysis of Doping Profiles in Inhomogeneous Semiconductor Structures
Kharkiv National University of Radio Electronic, Microelectronics, Electronic Devices and Appliences Department, Kharkiv, Ukraine; S. Babychenko; O. Babychenko; Kharkiv National University of Radio Electronic, Microelectronics, Electronic Devices and Appliences Department, Kharkiv, Ukraine; О. Galat; Kharkiv National University of Radio Electronic, Microelectronics, Electronic Devices and Appliences Department, Kharkiv, Ukraine
- Published
- Publisher
- Sumy State University
- Journal / collection
- Journal of Nano- and Electronic Physics
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.21272/jnep.17(4).04006
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Cite this source
Kharkiv National University of Radio Electronic, Microelectronics, Electronic Devices and Appliences Department, Kharkiv, Ukraine; S. Babychenko; O. Babychenko; Kharkiv National University of Radio Electronic, Microelectronics, Electronic Devices and Appliences Department, Kharkiv, Ukraine; О. Galat; Kharkiv National University of Radio Electronic, Microelectronics, Electronic Devices and Appliences Department, Kharkiv, Ukraine. Microwave Photomodulation Method for Noninvasive Analysis of Doping Profiles in Inhomogeneous Semiconductor Structures. Journal of Nano- and Electronic Physics. 2025. https://doi.org/10.21272/jnep.17(4).04006