Digital Twin-Based Optimization of Operational Parameters for Cluster Tools in Semiconductor Manufacturing
Joonick Hwang; Sang do Noh
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Access
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/access.2024.3450869
The original publisher provides the full text and its access options.
Cite this source
Joonick Hwang; Sang do Noh. Digital Twin-Based Optimization of Operational Parameters for Cluster Tools in Semiconductor Manufacturing. IEEE Access. 2024. https://doi.org/10.1109/access.2024.3450869