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Research literature / Journal article

Development of Electrical Variable Capacitor Using Fast Recovery Diodes for Semiconductor Manufacturer System

Cheong-Hyeon Hwang; Hong-Min Kim; Hee-Won Choi; Yong-Sug Suh; Cheon-Yong Lim

Published
Publisher
The Korean Institute of Power Electronics
Journal / collection
THE TRANSACTIONS OF KOREAN INSTITUTE OF POWER ELECTRONICS
Research area
Semiconductors
Source type
Journal article
DOI
10.6113/tkpe.2024.29.6.503

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Cheong-Hyeon Hwang; Hong-Min Kim; Hee-Won Choi; Yong-Sug Suh; Cheon-Yong Lim. Development of Electrical Variable Capacitor Using Fast Recovery Diodes for Semiconductor Manufacturer System. THE TRANSACTIONS OF KOREAN INSTITUTE OF POWER ELECTRONICS. 2024-12-31. https://doi.org/10.6113/tkpe.2024.29.6.503

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