Gettering and Defect Engineering in Semiconductor Technology (GADEST 2024)
Johannes Heitmann; Franziska Beyer; Daniel Hiller; Teimuraz Mchedlidze; Matthias Müller
- Published
- Publisher
- Wiley
- Journal / collection
- physica status solidi (a)
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1002/pssa.202400631
The original publisher provides the full text and its access options.
Cite this source
Johannes Heitmann; Franziska Beyer; Daniel Hiller; Teimuraz Mchedlidze; Matthias Müller. Gettering and Defect Engineering in Semiconductor Technology (GADEST 2024). physica status solidi (a). 2024-09. https://doi.org/10.1002/pssa.202400631