Fourier-attention network: A deep neural network for lithographic misalignment sensing
Nan Wang; Yi Li; Wei Jiang; Zhen'an Qin; Jun Liu
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Optics and Lasers in Engineering
- Research area
- AI & compute
- Source type
- Journal article
- DOI
- 10.1016/j.optlaseng.2024.108054
The original publisher provides the full text and its access options.
Cite this source
Nan Wang; Yi Li; Wei Jiang; Zhen'an Qin; Jun Liu. Fourier-attention network: A deep neural network for lithographic misalignment sensing. Optics and Lasers in Engineering. 2024-05. https://doi.org/10.1016/j.optlaseng.2024.108054