Robust Cross-Chamber One-Class Fault Detection in Semiconductor Manufacturing
Qirui Bai; Shuangwu Chen; Huihuang Qin; Dong Jin; Xiaobin Tan; Huasen He; Guohao Wang; Jian Yang
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Automation Science and Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tase.2025.3562244
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Cite this source
Qirui Bai; Shuangwu Chen; Huihuang Qin; Dong Jin; Xiaobin Tan; Huasen He; Guohao Wang; Jian Yang. Robust Cross-Chamber One-Class Fault Detection in Semiconductor Manufacturing. IEEE Transactions on Automation Science and Engineering. 2025. https://doi.org/10.1109/tase.2025.3562244