Nonlinear Variation Decomposition of Neural Networks for Holistic Semiconductor Process Monitoring
Hyeok Yun; Hyundong Jang; Seunghwan Lee; Junjong Lee; Kyeongrae Cho; Seungjoon Eom; Soomin Kim; Choong‐Ki Kim; Hong‐Chul Byun; Seongjoo Han; Min‐Soo Yoo; Rock‐Hyun Baek
- Published
- Publisher
- Wiley
- Journal / collection
- Advanced Intelligent Systems
- Research area
- AI & compute
- Source type
- Journal article
- DOI
- 10.1002/aisy.202300920
The original publisher provides the full text and its access options.
Cite this source
Hyeok Yun; Hyundong Jang; Seunghwan Lee; Junjong Lee; Kyeongrae Cho; Seungjoon Eom; Soomin Kim; Choong‐Ki Kim; Hong‐Chul Byun; Seongjoo Han; Min‐Soo Yoo; Rock‐Hyun Baek. Nonlinear Variation Decomposition of Neural Networks for Holistic Semiconductor Process Monitoring. Advanced Intelligent Systems. 2024-09-04. https://doi.org/10.1002/aisy.202300920