Predictive maintenance in semiconductor manufacturing: Comparative analysis of machine learning models for downtime reduction
Suriya Phongmoo; Chaichana Suedumrong; Chakkrapong Kuensaen; Runchana Sinthavalai; Komgrit Leksakul
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Computers & Industrial Engineering
- Research area
- AI & compute
- Source type
- Journal article
- DOI
- 10.1016/j.cie.2025.111211
The original publisher provides the full text and its access options.
Cite this source
Suriya Phongmoo; Chaichana Suedumrong; Chakkrapong Kuensaen; Runchana Sinthavalai; Komgrit Leksakul. Predictive maintenance in semiconductor manufacturing: Comparative analysis of machine learning models for downtime reduction. Computers & Industrial Engineering. 2025-07. https://doi.org/10.1016/j.cie.2025.111211