Scan Speed Optimization for Wafer Exposure Time Reduction in Semiconductor Manufacturing
Jisu Kim; Hyeseon Kwon; Kwanghyun Cho; Myungsik Lee; Weonchan Sung; Yunha Kim; Jeong-Gil Kim
- Published
- Publisher
- IEEE
- Journal / collection
- IECON 2024 - 50th Annual Conference of the IEEE Industrial Electronics Society
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/iecon55916.2024.10905733
The original publisher provides the full text and its access options.
Cite this source
Jisu Kim; Hyeseon Kwon; Kwanghyun Cho; Myungsik Lee; Weonchan Sung; Yunha Kim; Jeong-Gil Kim. Scan Speed Optimization for Wafer Exposure Time Reduction in Semiconductor Manufacturing. IECON 2024 - 50th Annual Conference of the IEEE Industrial Electronics Society. 2024-11-03. https://doi.org/10.1109/iecon55916.2024.10905733