Fault diagnosis in semiconductor manufacturing processes using a CNN-based generative adversarial network1
Palanichamy Naveen; S. NithyaSai; Venkateshkumar Udayamoorthy; S.R. Ashok kumar
- Published
- Publisher
- SAGE Publications
- Journal / collection
- Journal of Intelligent & Fuzzy Systems
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.3233/jifs-231948
The original publisher provides the full text and its access options.
Cite this source
Palanichamy Naveen; S. NithyaSai; Venkateshkumar Udayamoorthy; S.R. Ashok kumar. Fault diagnosis in semiconductor manufacturing processes using a CNN-based generative adversarial network1. Journal of Intelligent & Fuzzy Systems. 2024-01-10. https://doi.org/10.3233/jifs-231948