A novel integrated microsphere-assisted hyperspectral metrology and autofocus method for semiconductor devices
Soonyang Kwon; Jangryul Park; Young-sun Choi; Kwangrak Kim; Youngjun Lee; Jiwoong Kim; Taeyong Jo; Myungjun Lee
- Published
- Publisher
- SPIE
- Journal / collection
- Novel Optical Systems, Methods, and Applications XXVII
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3025804
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Cite this source
Soonyang Kwon; Jangryul Park; Young-sun Choi; Kwangrak Kim; Youngjun Lee; Jiwoong Kim; Taeyong Jo; Myungjun Lee. A novel integrated microsphere-assisted hyperspectral metrology and autofocus method for semiconductor devices. Novel Optical Systems, Methods, and Applications XXVII. 2024-10-02. https://doi.org/10.1117/12.3025804