Carbon Nanotube Based Cold Cathode Electron Beam (C-beam) for Semiconductor Manufacturing Process
Kyu Chang Park; Iksu Kim; Umesh Balaso
- Published
- Publisher
- International Display Workshops General Incorporated Association
- Journal / collection
- Proceedings of the International Display Workshops
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.36463/idw.2024.1080
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Cite this source
Kyu Chang Park; Iksu Kim; Umesh Balaso. Carbon Nanotube Based Cold Cathode Electron Beam (C-beam) for Semiconductor Manufacturing Process. Proceedings of the International Display Workshops. 2024-12-04. https://doi.org/10.36463/idw.2024.1080