Study of problems in application and design of SCARA robots in the semiconductor industry
Vanesa Chavushyan; Stiliyan Nikolov; Vania Georgieva
- Published
- Publisher
- AIP
- Journal / collection
- AIP Conference Proceedings
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1063/5.0196533
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Cite this source
Vanesa Chavushyan; Stiliyan Nikolov; Vania Georgieva. Study of problems in application and design of SCARA robots in the semiconductor industry. AIP Conference Proceedings. 2024. https://doi.org/10.1063/5.0196533