A Digital Twin Framework With Bayesian Optimization and Deep Learning for Semiconductor Process Control
Chin-Yi Lin; Tzu-Liang Tseng; Tsung-Han Tsai
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Access
- Research area
- AI & compute
- Source type
- Journal article
- DOI
- 10.1109/access.2025.3551332
The original publisher provides the full text and its access options.
Cite this source
Chin-Yi Lin; Tzu-Liang Tseng; Tsung-Han Tsai. A Digital Twin Framework With Bayesian Optimization and Deep Learning for Semiconductor Process Control. IEEE Access. 2025. https://doi.org/10.1109/access.2025.3551332