Plasma Pretreatment System for the Reduction of By-Product Particles in Semiconductor Manufacturing
Se Yun Jo; Minsuk Choi; Sang Jeen Hong
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Semiconductor Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsm.2024.3402214
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Cite this source
Se Yun Jo; Minsuk Choi; Sang Jeen Hong. Plasma Pretreatment System for the Reduction of By-Product Particles in Semiconductor Manufacturing. IEEE Transactions on Semiconductor Manufacturing. 2024-08. https://doi.org/10.1109/tsm.2024.3402214